Thermo-Optic Phase Tuners Analysis and Design for Process Modules on a Silicon Nitride Platform

In this paper, we present a systematic design for manufacturing analysis thermo-optic phase tuners, framed within the process modules available on silicon nitride platform. Departing from an established technology platform, heat distribution in various micro-structures was analyzed, both steady and transient states, employing 2D transfer model solved numerically. Multi-parametric simulations were performed designs combining trenches substrate undercut, by varying their position dimensions. The simulation results compared to reference conventional fully-clad cross-section. Deep air-filled are shown reduce power consumption up 70%, alongside thermal crosstalk shift reduction of more than one order magnitude (0.045 π rad/mm), at expense slightly lower bandwidth (11.8 kHz). with undercut lowers 97%, decreases two orders (0.006 cost less (0.9 works, selected three different heater materials (Cr/Au, Al, poly-silicon) offered fab four widths (2.5 7 μm). Their combinations related performance, reliability durability devices, strongly linked temperature, current density, Omegaic resistance. figures merit defined, methodology followed, can be mimicked future designers take decisions bird’s eye.